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PLASMA, CHEMICAL ETCHERS, & CVD SYSTEMSE. McGrath Inc,
35 Osborne St, Salem MA 01970
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SC0400
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Drytek Megastrip 6 etchers dual 9x6x7"etch chambers Without RF supply or pump.
Two for lot price |
$4,500
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SC0401
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Drytek DRIE102 etcher w/RF & Edwards E2M80/EH500
PIX2 |
POR |
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SC0410
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LFE PDS 302-4IR plasma stripper dual 4"quartz chamber, 300 wt
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$5,500
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SC0415
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LFE 501 & 1002, Used parts
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POR
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SC0416 |
Mercator Control System LF-5 photoresist stripper(Same as Technics 500-II) 8-1/2" wide,
7-1/2" deep. 500 watts. Requires 14 cfm Fomblin filled pump, not included. PIX2
New Arrival |
$6,500 |
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SC04l8
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Fluorocarbon Mini-Classic "A" rinser/dryer , dual chambers horizontal rotation
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$3,150
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SC0419
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PSI Hexode etcher MPT-HEX-1 set up for 24- 3" wafers 22 x 30" h, ss jar programmers Vacuum General mass flow controllers, 3 kw RF plasma supply, w/o vacuum system
PIX2 |
$6,500
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SC0422
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Pacific Western 2000 vapor deposition system at atmosphere
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$4,250
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SC0428
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International Plasma etcher, dual tube, 3" dia x 13" l w/o RF supply or controller
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$600
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SC0429 |
IPC PM1813 plasma etcher, single 8 x 14" tube, RF supply or controller
PIX2 |
$1,650 |
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SC0436
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NEW quartz chamber for LFE 8000 plasma nitride etcher |
$1,200
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SC0437 |
Used quartz reaction chamber for LFE 8000 plasma nitride deposition |
$700 |
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SC0438
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Branson Sigma 80 plasma etcher, planar, cassette, 4" w/o pump
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$5,000
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SC0440 |
Branson/IPC S2000 10 x 20" plasma etcher, w/o interconnect cables; with PM
119 500 watt RF generator
PIX2
New Arrival |
$4,500 |
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SC0444
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Tegal 302 plasma dep. 16"x24" substrates w/Alcatel 2060 AC pump, filter 3 kw generator, Plasma Therm 5 gas capability
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$17,500
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SC0445
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Tegal 700, 4" cassette to cassette plasma etcher 3@
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$1,950
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SC0446 |
Tegal 221 dry etcher, aluminum chamber, 8" diameter, with 13.56mhz, 300
supply. 115 volts PIX2
PIX3 As-is |
$1,950 |
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SC0452
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PT Analytical 210 end point controller unit, w/o monochrometer/detector 2@
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$500
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SC0453
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Xinix 1011B end point detector, controller only
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$1,750
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SC0454
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Xinix 1014 enpoint controller and 1104 monochrometer
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$3,450
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SC0458
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EG&G/PAR optical multi-channel analyzer, 1451 plasma monitor w/1452, 512 element 2.5 mm aperture SIPD detector, HP 1340A display
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$2,500
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SC0460 |
Semitool SDC-400 photo mask etch spinner, 150 mm w/acid pumps & controls
PIX2 |
$5,750
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SC0462
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Semitool SAT0061 T, 3 chamber, 6" w/o RCS SN: G20363
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$4,250
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SC0464
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Semitool SAT271 spray acid processor, 150 mm, w/125 mm adapters w/separate power
& heat console, w/manuals, PIX2 |
$4,950
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SC0468
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FSI Atlas solvent processor, 900999-001, 150 mm, w/2800 controller, RS232C & ss canister console w/manual, 120V
PIX2
PIX3
PIX4
PIX5 |
$6,500
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SC0470 |
Tempress 425C rotor carriers, adjustable from 2 to 5". set of 4 |
$825 |
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SC0471 |
Spin rinser turntable, 19" diameter, holds 4 125 mm wafer carriers, stainless.
3/4 " shaft mount, with spray heads. J78106 |
$750 |
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SC0472 |
Spin rinser turntable, 19" diameter, holds 6 125 mm wafer carriers, coated,
3/4 " shaft mount, with spray heads 901372 |
$950 |
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SC0479 |
LFE PSM1824 plasma etch/drill smear removal system with HFS-3000E generator and
controls.32" diameter by 40" stainless chamber with 4" ASA rear pumping port. Does not include pump (150 cfm).
PIX2 |
$8,500 |
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SC0486
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CTI/Forma Scientific wet bench, 4', 5 tank includes 2 quick dump rinse tanks
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$3,950
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SC0489
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Semitool STI 260C rinser dryer, now with 3" rotor, w/o controller
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$1,300
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SC0490
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IPC/Branson series 4000; PM1813 reactor center only, 8" diameter x 14" deep.
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$1,250
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