Used High Vacuum Evaporators & Sputtering Systems;Varian, Balzers, CVC, Veeco, Sloan, MRC, NRC, CHA

USED VACUUM EVAPORATORS, METALLIZERS & SPUTTERING SYSTEMS

The following vacuum systems as priced are guaranteed to be serviceable.
All major system components are guaranteed for 60 days from receipt.
This guarantee does not insure system performance to original manufacturer's specification without normal maintenance, such as component cleaning, "O" ring and fluid replacement plus electronic tuning & calibration.

OVERHAUL AVAILABLE ON ALL OF THE SYSTEMS POR

E. McGrath Inc, 35 Osborne St, Salem MA 01970

VES0200 Balzers Model SCS800 Source Isolated Fast Cycle E Beam Box Coater $89,000

Balzers SCS-800 includes 35 ½"" w x 35"d x 26" high water traced ss deposition chamber w/horizontal substrate rotary & full opening, hinged, "O" ring sealed door w/film shutter viewport. The source chamber is isolated from the deposition chamber by a large plate valve in order to facilitate short pump down times. The pumping system consists of a Balzers Model RCP501Z cryopump rated at 27500 l/s water vapor or 10,000 l/s air, complete w/Balzers Model UCC064 water cooled compressor, all hoses, cables, temperature indicator, electropneumatic valves/microprocessor controlled sequencer & Balzers Model WKP500 - 345 CFM roots style blower w/Balzers Model DUO100-57 CFM- mechanical pump. The evaporative system includes a Balzers Model ESQ113, multi-pocket E Beam Gun w/one 60 cc crucible & two 30 cc crucibles w/turret source selector, wire feed, shutter, Balzers EHV110A -15 KW- E Beam power supply w/one EKS110A gun control & one LCS110A longitudinal sweep control, substrate heaters controller, RF power supply &matching network for RF etch. Ionization & pirani gauges are also included.

VES0300 International Vacuum, Inc. E Beam Box Coater $82,000

Includes 37" w x 37" d x 37" tall ss vacuum chamber w/full opening, hinged, O- ring sealed door w/4" ID viewport The pumping system consists of a Varian/NRC VHS10 diffusion pump rated at 5300 l/s air Varian/NRC 316-10 cryotrap, electropneumatic valves w/sequencer a 53 CFM mechanical vacuum pump to continuously back the diffusion pump & a Leybold WSU1000 blower -666 CFM close coupled with Stokes 212H11- 150 CFM- mechanical vacuum pump to be used exclusively to rough the chamber. The evaporative system consists of a Temescal SFIH270-3 large capacity single pocket E gun w/Temescal CV14 14 kw E beam power supply with sweep control. This system also has substrate heat & rotation capability with deposition monitor & combination ion/thermocouple gauge controller are included. PIX2 PIX3 PIX4 PIX5

VES0325 Denton DV-504 thermal evaporator $17,500

Includes 25" ID x 30" tall stainless steel bell jar, baseplate driven rotary fixture, manually operated valves with air op high vacuum valve, VHS6 diffusion pump with LN₂ baffle, hydraulic hoist, 2 KVA filament transformer with tap switch, Dynoptics 580D optical monitor, cold cathode discharge and TC gauges, and 17 cfm mechanical pump PIX2 PIX3 PIX4

VES0350 CVC with CHA jar thermal evaporator $24,950

Includes 18" ID x 30" tall CHA stainless steel bell jar, 20" baseplate, CHA planetary fixturing with 6-1/2 x 3-3/8" flip fixtures. CVC PVMS100 expanded 6" diffusion pump, LN₂ trap and electropneumatic valves. 2 KVA filament transformer, with 3 panel selectable high current posts, manual fixture flip, CVC AVC485 auto sequencer, Penning gauge, Inficon XTC quartz crystal monitor and mechanical pump. PIX2 PIX3 PIX4 PIX5 New Arrival

VES0700 K H Frederick 1854 32" Box thermal evaporator $67,500

Includes 32" dia z 30" tall cylindrical back stainless steel chamber with full opening, hinged, o-ring sealed door with 6" ID viewport. The pumping system consists of a Varian VHS10 high speed diffusion pump rated at 5300 l/s, a Varian 330 water cooled baffle, pneumatic vane style throttle valve, electropneumatic valves with sequencer and an Edwards E2M80; 57 cfm, two stage direct drive mechanical roughing pump. The evaporative system includes dual 5 KVA filament transformers with SCR controller & ammeter, two pairs of high current feedthroughs with shutter, 30" diameter domed substrate holder with motorized horizontal plane rotation & speed control, glow discharge power supply; 7KV @ 700ma, 4 kw quartz lamp substrate heaters with control & timer, Sloan Omni III quartz crystal deposition controller. A cold cathode discharge & two position thermocouple gauge are also included. PIX2 PIX3 PIX4 PIX5

VES0800 CVC Modified CV18 Vacuum Evaporator $9,500

Includes 26" OD x 29" tall ss bell jar currently fitted w/internal cooling shroud (usable interior dimensions 19 ½" dia x 26" high) w/electromechanical hoist. The pumping system consists of a CVC 6" diffusion pump rated at 1400 l/s, a multicoolant baffle, manual valves & a 23 CFM mechanical roughing pump. The evaporative system includes a variac controlled 2 kva filament transformer w/2 high current feedthroughs. A CVC 'combination ion/thermocouple gauge is also included. Generic Photo

VES0825 CVC Custom CV18 Vacuum Evaporator POR

Includes 25" ID x 30" tall CHA style ss belljar w/o water tracing, with 4" ID viewport, motor mounting bracket, rotary motion feedthrough & deposition monitor housing and blank housing plate on a 26" OD baseplate with electromechanical hoist. Baseplate terminates in a 6" ASA flange & would be configured for either manual or electropneumatic valve operation & high vacuum pumping based upon customer requirement; evaporative system to suit customer demands. Generic Photo

VES0840 Balzers BA709 Resistance Evaporator $17,500 New Arrival

Includes 33" ID x 36" tall stainless steel bell jar w/o water tracing, with three 2.5" ID viewports, Diff 1900, mechanical vacuum pump, hydraulic hoist, resistance transformers and gauging. PIX2 PIX3 PIX4 PIX5

VES0850 Balzers BA510 Vacuum Evaporator $22,500

Includes 20" ID x 25" tall stainless water traced bell jar with two 3½" ID viewports on a 22" OD stainless steel baseplate with hydraulic hoist. The pumping system consists of a DIF200 diffusion pump rated at 2000 l/s, a Balzers BFA200W water cooled baffle, electropneumatic valves with Balzers PC101 vacuum system controller and a Balzers DUO030A - 26.5 cfm direct drive mechanical roughing pump. The evaporative systems consists of a filament transformer with 2 high currrent feedthroughs, manual shutter with motorized horizontal substrate rotation. Includes Balzers PKG100 digital cold cathode/Pirani gauge.

VES0860 Varian 980-2461 E Beam Evaporator $24,750 New Arrival

25 x 30 tall stainless steel bell jar system with 21-1/2" ID x 26" OD base plate, collar, Temescal STIH-270-2M 4 pocket, 15cc gun, two Temescal SFIH-270-1, 7 cc guns, filament transformers, Varian VHS250 diffusion pump, 3,700 l/s, 767216 LN2 trap valve, mechanical hoist, rotary and other items as shown. With a choice of jars from belljars such as VBJ250 or VBJ400 Does not include any e beam supplies, controls or mechanical pump. PIX2 PIX3

VES1100 NRC /Varian 3117 E Beam Vacuum Evaporator $28,500

Includes 18" dia x 30" tall Pyrex bell jar w/implosion cage on a 20" dia ss baseplate w/electromechanical hoist. The pumping system consists of a NRC/Varian VHS6 diffusion pump rated at 2400 l/s, a NRC 316 series LN2 trap, electropneumatic valve w/sequencer & a 17 CFM mechanical roughing pump. The evaporative system includes a Temescal TIH270 four pocket E Beam gun w/ES6A - 6 KW E Beam power supply. A combination ion & 2 position thermocouple gauge is also included. PIX2

VES1200 Sloan SL1800-1 Electron Beam Evaporator $29,500

This 18" dia x 30" Pyrex bell jar system includes a Sloan small capacity multihearth (4 pocket) 180° electron beam gun w/Sloan 6/10 E beam power supply & Y axis sweep. Additional deposition apparatus includes: Deposition monitor, pneumatic Iris shutter, Sloan 7/7 glow discharge power supply, flat plate planetary fixtures, substrate heater w/temperature controller. The pumping system consists of a Varian VHS6 diffusion pump rated at 2400 l/s, an integral LN2 trap w/controller, electropneumatic valves w/Sequentorr sequencer ion/thermocouple gauge & a Welch 1397 -17.7 CFM- mechanical roughing pump

VES1300 CVC CV18 Vacuum Evaporator $12,500

Includes 18" dia x 30" tall Pyrex bell jar w/implosion cage on 20" OD ss baseplate w/electromechanical hoist. The pumping system consists of a CVC PMC6 diffusion pump rated at 1400 l/s a CVC BCN61 LN₂ trap, electropneumatic valves w/sequencer & a 17 CFM mechanical roughing pump. The evaporative system includes a Variac controlled 2 KVA filament transformer w/ammeter w/two high current feedthroughs. A combination ion & thermocouple gauge is also included. Generic Photo

VES1450 GCA 18 x 30 Thermal Evaporator Price: see below

Requires 18" dia x 30" tall jar. 20" ss baseplate with air/hydraulic hoist. Req. 6" diff pump, 6 x 4" adapter and 4" air operated gate valve. Two high current transformers, SCR controlled, flip substrate holder, Ion/TC gauge. $3,000 as-is, w/o the pictured CTI Regen controller. We can supply at extra cost, a diffusion pump, cryopump, or mechanical pump

VES1475 Denton DV-503FP thermal evaporator POR

Includes 18 x 30" Pyrex jar, 2 KVA filament source with tap switch, manual valves with cryo baffle 4" NRC diffusion pump, 17 cfm mechanical pump, electric hoist and Varian cold cathode & TC gauging. PIX2

VES1800 Edwards 19E Vacuum Evaporator. $7,850

The 19" dia x 24" h ss bell jar has two 4" dia viewports on the side & one air-release valve. The top has one 1½" blanked off port & one 4" viewport. The three 4" ports & the waist of the bell jar are water traced. The bell jar has a hydraulic hoist & seals onto a 20" dia steel plated baseplate w/fourteen 1" dia feedthrough holes. A 4" high ss feedthrough collar w/16 feedthrough holes is also included. Feedthroughs include: two low voltage, water cooled high current type; three high voltage medium current type; one octal instrument type. The pumping system of one 23 CFM mechanical pump & one Edwards F903 diffusion (1500 l/s). Manual & electric solenoid valves are used throughout the system. This system includes one, variac controlled, 3.4 kva filament power supply w/output power at 10 volts & one variac controlled 1 kva filament power supply w/output power 10 or 20 volts. A spare bell jar is also available

VES1810 NRC 3115 Thermal Evaporator POR

Includes 18 x 30" tall stainless steel bell jar, 2 KVA filament power supply with tap switch, M4 diffusion pump, cryo baffle and 17 cfm mechanical pump. With ion/tc gauging and automatic valve sequencer. Counter weighted hoist.

VES1820 Varian 3115 bell jar system POR

Includes 18 x 30" tall stainless steel water traced jar, VHS4 diffusion pump, cryo baffle and 17 cfm mechanical pump, electro mechanical hoist, pneumatic valving with toggle switches and ion/tc gauge.

VES1850 Veeco VE775 Vacuum Evaporator $ POR

Includes 18" ID x 30" tall Pyrex bell jar with implosion cage on a 20" diameter stainless baseplate with electromechanical hoist; requires major components, modification and overhaul

VES1860 NRC 3114 Thermal Evaporator POR

20" baseplate, manually operated 4" diffusion pumped system, 17 cfm mechanical pump,2 kva transformer. PIX2

VES1900 Heraeus Vacuum Evaporator $7,500

Includes 20" ss baseplate w/18" dia x 23" high Pyrex bell jar w/implosion cage & counter weighted hoist. The pumping system consists of a Heraeus 6" diffusion pump, ambient cooled baffle, Airco LN2 baffle, electropneumatic valves w/sequencer & 17 CFM mechanical roughing pump. The evaporative system includes a variac controlled 2 kva filament transformer w/3 high current, a glow discharge & a rotary feedthrough An AC-DC glow discharge power supply & a combination ion/thermocouple gauge is also included. PIX2 PIX3

VES2000 Balzers BA500 Vacuum Evaporator $6,950

Includes 20" ID x 25" tall ss water traced bell jar on a plated mild steel baseplate w/hydraulic hoist. The pumping system consists of a DIF500 diffusion pump rated at 570 l/s & a H₂O cooled baffle w/manual valves & 16-17 CFM- mechanical roughing pump. The evaporative system consists of a Variac controlled 2 kva filament transformer w/ammeter, 3) H₂O cooled high current feedthroughs, feed- through & voltage selector tap switches, high voltage glow discharge transformer w/high voltage feed- through a combination cold cathode/thermocouple gauge is also included. PIX2 PIX3 PIX4

VES2200 CVC CVE15 Vacuum Evaporator. $5,500

This system includes 20" OD ss baseplate w/14" dia x 18" tall Pyrex bell jar w/ implosion cage. The pumping system consists of a CVC PMC4 diffusion pump rated at 690 l/s, BCN41 LN2 baffle, manual valves & a 5.6 CFM mechanical roughing pump. The evaporative system includes a variac controlled 2 kva filament transformer w/ammeter & two high current feedthroughs. A CVC GIC 110 combination ion/thermocouple gauge is also included. File photos of one of these after an optional overhaul: PIX1 PIX2

VES2300 Balzers Right Angle Pumping Stack $9,500

for sputtering systems, includes DIF 250 diffusion pump rated at 3100 l/s, a LN2 trap a right angle air- operated valve & air-operated throttle valve a Meissner trap w/manifold. All in a heavy duty roll-around cart w/DUO 100-59 CFM- mechanical roughing pump

VES2400 NRC 33l7 High Vacuum Pumping System $5,500

With Varian NHS-6 diffusion pump, LN₂ baffle air operated valves, sequencer, 10 CFM Welch mechanical pump

VES2500 Innotec S1000 high speed pump module $4,850

Includes Innotec Model R620 diffusion pump rated at 2400 l/s, an Innotec Model LNB62- LN2 trap, ss gate and manifold valves. All electropneumatically operated, system pumping speed rated at 1160 l/s

VES2600 CVC PSE43 High Vacuum station $5,250

Includes CVC Model PMC4 diffusion pump rated at 690 l/s, a BCN41 LN2 baffle, manual valves and a 17 CFM mechanical roughing pump. This system terminates in a 4" ASA flange, and also includes a CVC combination ion/thermocouple gauge.

VES2700 Alcatel portable air-cooled diffusion pump vacuum system $4,750

Includes Model PDR250 air-cooled diffusion pump rated at 250 l/s air with ambient -cooled baffle manually operated high vacuum butterfly valve & independent manually operated bellows sealed roughing & foreline valves with an Alcatel Model 2004A - 3.2 CFM - direct drive mechanical roughing pump. Gauging includes Alcatel Model CFA1222 analog combination Penning & single station convection gauge complete with gauge tubes and cables, an additional Alcatel Model CA111, analog single station convection gauge is provided for full time monitoring of the foreline pressure. All components mounted on a convenient roll around cart & terminate in a KF50 flange

VES2800 Edwards Cryo Cooled Diffstak 63 packaged pump system $5,500

Includes Edwards Model CR63M water-cooled diffusion pump w/integral LN2 trap rated at 144 l/s,. manually operated high vacuum butterfly valve, Edwards BRV10 combination manually operated backing/roughing valve, with an Edwards Model E2M5- 4 CFM direct drive mechanical roughing pump. Gauging includes an Edwards 1005 digital combination Penning & two station Pirani gauge. Complete with all gauge tubes and cables. All components are mounted on a convenient roll around cart and terminate is a 2.75" OD conflat flange.

VES2820 Edwards Cryo-cooled Diffstak 63 packaged pumping system – air-operated $6,250

Includes Edwards CR63P water-cooled diffusioin pump with integral LN2 trap rated at 144 l/s, electropneumatic valves , with an Edwards E2M5 – 4 cfm direct drive mechanical roughing pump. Gauging includes an Edwards 1005 digital combination Penning & two station Pirani gauge. Complete with all gauge tubes and cables. All components are mounted on a convenient roll around cart and terminate in a 2.75" OD Conflat flange

VES2900 Varian HSA-2" air cooled pump stack $3,650

Includes HSA -2" ASA air cooled diffusion pump rated at 150 l/s, Varian 325 cryo trap & electro – pneumatic valves w/manifold NEW

VES2920 Varian 3300 series cart mounted diffusion pump assembly POR

HSA/HS2/M2/M4/VHS4/M6/VHS6 systems are available either with or w/o LN2 baffle, gauging, manual or electropneumatic valving. Price dependent upon customer required components.

VES3000 Key High Vacuum Products Portable 3" air-cooled diffusion pump system. $4,950

System includes CVC Model PVMS 31A-3" air cooled diffusion pump w/blower rated at 285 l/s, LN₂ trap, manually operated valves, Alcatel Model 2004A - 3.2 CFM direct drive mechanical roughing pump & a combination ion/two position thermocouple gauge controller. All system components are mounted in a convenient roll around cart. PIX2 PIX3 Example of an overhaulled version of this, extra cost.

VES3100 Vecco VS300 Single Lever Controlled Pump System. $4,750

System includes Veeco 3" air cooled diffusion pump rated at 170 l/s, LN₂ trap, manually operated valves, Welch 1402 -5.6 CFM- mechanical roughing pump and a combination ion/thermocouple gauge controller All system components are mounted in a convenient roll around enclosure.

VES3200 Varian/NRC HS 10 pumping stack $5,500

System includes HS10, 4,000 l/sec diffusion pump, 480/3 heaters model 0163, 326-10 long life LN₂ baffle, mild steel right angle high vacuum pneumatic valve, and both roughing and foreline valves. Valve is water traced for vacuum furnace application.

VES3300 Sloan SL1800-S Automated DC Sputter Gun System. $18,500

This system includes 3 sputter gun heads w/Sloan Model SP 2/5 2kw power supply. The two part process chamber is l8" dia w/the lower ss portion 11" deep, while the upper Pyrex collar & plexiglass implosion cage adds 6" to the overall depth. The pumping system consists of a Varian VHS6 diffusion pump rated at 2400 l/s, integral LN2 trap w/controller, electropneumatic valves w/Sequentorr II sequencer, ion gauge & a Welch 1397-17.7 CFM mechanical roughing pump. A Sloan Model DDC500 digital deposition controller w/3 sensor heads, shutter control & horizontal planetary are also included. PIX2

VES3600 Gatan 645 Precision Ion Milling System $27,500

For thinning of TEM specimens, complete with imaging system, eucentric goniometer stage & auto termination. The vacuum system includes an air cooled Leybold Model TMP360 turbomolecular pump rated at 345 l/s w/6" OD conflat inlet & NT150/360 controller, an Alcatel 2008A, 7 CFM- direct drive backing pump and a combination ion & two position thermocouple gauge High Resolution Photo

VES3765 Balzers BAF301D Freeze-etching system for TEM sample preparation $7,250

With 19" tall x 15" wide vacuum chamber with tapered rear wall; 18" deep at bottom & 13" deep at top; with full opening O-ring sealed hinged door with 6" ID viewport. The chamber has additional KF & ISO ports. The pumping system consists of a Balzers Dif 900 diff pump and a MCG 900 combo LN2 trap with a rated pumping speed of 450 l/s at the inlet of the baffle. Electropneumatic valves are used throughout and a Duo 30A 26.5 cfm two-stage direct drive roughing pump is also included. Sample temperature is controlled by a Balzers GA1 freeze etching control unit from -150 to +50ºC with LN2 required for cooling. Additionally, a filament transformer with output of 4,8 & 16 volts for carbon evaporation and a Balzers QSG 201 film thickness monitor with QSK113 crystal holder. A vacuum system controller is not provided

PIX2 PIX3 PIX4 PIX5 PIX6 PIX7

VES3780 Technics Hummer I cold sputter system $2,950

For SEM sample preparation, includes 4" ID x 5 ½" tall Pyrex vacuum chamber with 2" OD disk type top mounted target, 2500 volt 50ma DC supply. 0-5 torr thermocouple gauge & self contained 1.5 cfm direct drive mechanical pump

VES3781 Technics Hummer CEA $695

Carbon evaporation accessory: Variac controlled 300 watt evaporation power supply, ammeter, top plate with two evaporation electrodes & cables. 115 volts.

Vacuum Systems as priced are guaranteed to be serviceable. All major system components are guaranteed for 60 days from receipt. This guarantee does not insure system performance to original manufacturer's specification without normal maintenance, such as component cleaning, "O" ring and fluid replacement plus electronic tuning and calibration.

NOTE: System overhaul is available at an additional charge, based upon system complexity and customer requirements. Above system may be modified to suit specific customer requirements with either vacuum components in stock or customer supplied apparatus
978-744-3546

www.emcgrath.com

4/13/08