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USED VACUUM EVAPORATORS, METALLIZERS & SPUTTERING SYSTEMS

The following vacuum systems as priced are guaranteed to be serviceable.
All major system components are guaranteed for 60 days from receipt.
This guarantee does not insure system performance to original manufacturer's specification without normal maintenance, such as component cleaning, "O" ring and fluid replacement plus electronic tuning & calibration. Buyer must undertake these repairs.  These are not turnkey.

E. McGrath Inc, 35 Osborne St, Salem MA  01970
VES0200 Balzers Model SCS800 Source Isolated Fast Cycle E Beam Box Coater $24,500

Balzers SCS-800 includes 35 ˝"" w x 35"d x 26" high water traced ss deposition chamber w/horizontal substrate rotary & full opening, hinged, "O" ring sealed door w/film shutter viewport. The source chamber is isolated from the deposition chamber by a large plate valve in order to facilitate short pump down times. The pumping system consists of a Balzers Model RCP501Z cryopump rated at 27500 l/s water vapor or 10,000 l/s air, complete w/Balzers Model UCC064 water cooled compressor, all hoses, cables, temperature indicator, electropneumatic valves/microprocessor controlled sequencer & Balzers  DUO100-57 CFM- mechanical pump. The evaporative system includes a Balzers Model ESQ113, multi-pocket E Beam Gun w/one 60 cc crucible & two 30 cc crucibles w/turret source selector, wire feed, shutter, Balzers EHV110A -15 KW- E Beam power supply w/one EKS110A gun control & one LCS110A longitudinal sweep control, substrate heaters controller, RF power supply &matching network for RF etch, and  Ionization & pirani gauges.  WAREHOUSE REDUCTION SPECIAL $24,500

 PIX2 PIX3 PIX4 PIX5 PIX6 PIX7 PIX8 PIX9 PIX10 PIX11 PIX12 PIX13 PIX14

   

VES0300 International Vacuum, Inc. Box Coater $21,500

Includes 37" w x 37" d x 37" tall ss vacuum chamber w/full opening, hinged, O- ring sealed door w/4" ID viewport The pumping system consists of a Varian/NRC VHS10 diffusion pump rated at 5300 l/s air Varian/NRC 316-10 cryotrap, electropneumatic valves , 53 CFM mechanical vacuum pump to continuously back the diffusion pump & a Leybold WSU1000 blower -666 CFM close coupled with Stokes 212H11- 150 CFM- mechanical vacuum pump to be used exclusively to rough the chamber.  PIX2 PIX3 PIX4  PIX5  PIX6 Chamber only available POR

VES0325 Denton DV-504 thermal evaporator  $17,500

Includes 25" ID x 30" tall stainless steel bell jar, baseplate driven rotary fixture, manually operated valves with air op high vacuum valve, VHS6 diffusion pump with LN2 baffle, hydraulic hoist, 2 KVA filament transformer with tap switch, Dynoptics 580D optical monitor, cold cathode discharge and TC gauges, and 17 cfm mechanical pump  PIX2 PIX3 PIX4

VES0330 Veeco 7761 Electron Beam Evaporator $24,500

With 19 x 30 CHA stainless steel jar, CTI 8 pump & compressor, Sloan Pak-12 ebeam supply, multi pocket gun, Inficon XTC monitor and other items as pictured.  PIX2 PIX3 PIX4 New Arrival

 VES0520 NRC/Varian 3177 thermal evaporator  $9,500

With 18 x 24" Pyrex bell jar on a 25" stainless baseplate, 6" Varian M6 diffusion pump,  2 KVA filament transformer, control and tap switch, pneumatic valves and ion/tc gauge.  PIX2 PIX3 PIX4 

VES0700 K H Frederick 1854 32" Box thermal evaporator  $67,500

Includes 32" dia z 30" tall cylindrical back stainless steel chamber with full opening, hinged, o-ring sealed door with 6" ID viewport.  The pumping system consists of a Varian VHS10 high speed diffusion pump rated at 5300 l/s, a Varian 330 water cooled baffle, pneumatic vane style  throttle valve, electropneumatic valves with sequencer and an Edwards E2M80; 57 cfm, two stage direct drive mechanical roughing pump.  The evaporative system includes dual 5 KVA filament transformers with SCR controller & ammeter, two pairs of high current feedthroughs with shutter, 30" diameter domed substrate holder with motorized horizontal plane rotation & speed control, glow discharge power supply; 7KV @ 700ma, 4 kw quartz lamp substrate heaters with control & timer, Sloan Omni III quartz crystal deposition controller. A cold cathode discharge & two position thermocouple gauge are also included.   PIX2 PIX3  PIX4 PIX5 PIX6

VES0840 Balzers BA709 Resistance Evaporator $17,500          

Includes 33" ID x 36" tall stainless steel bell jar w/o water tracing, with three 2.5" ID viewports, Diff 1900, mechanical vacuum pump, hydraulic hoist, resistance transformers and gauging. PIX2 PIX3 PIX4 PIX5

VES0850 Balzers BA510 Vacuum Evaporator $22,500

Includes 20" ID x 25" tall stainless water traced bell jar with two 3˝" ID viewports on a 22" OD stainless steel baseplate with hydraulic hoist. The pumping system consists of a DIF200 diffusion pump rated at 2000 l/s, a Balzers BFA200W water cooled baffle, electropneumatic valves with Balzers PC101 vacuum system controller and a Balzers DUO030A - 26.5 cfm direct drive mechanical roughing pump. The evaporative systems consists of a filament transformer with 2 high currrent feedthroughs, manual shutter with motorized horizontal substrate rotation. Includes Balzers PKG100 digital cold cathode/Pirani gauge.

VES1100 NRC /Varian 3117 E Beam Vacuum Evaporator $9,500

Includes 18" dia x 30" tall Pyrex bell jar w/implosion cage on a 20" dia ss baseplate w/electromechanical hoist. The pumping system consists of a NRC/Varian VHS6 diffusion pump rated at 2400 l/s, a NRC 316 series LN2 trap, electropneumatic valve w/sequencer & a 17 CFM mechanical roughing pump. The evaporative system includes a Temescal TIH270 four pocket E Beam gun w/ES6A - 6 KW E Beam power supply. Sloan Omni III quartz crystal deposition monitor. A combination ion & 2 position thermocouple gauge is also included. PIX2 PIX3 PIX4 PIX5 PIX6 PIX7 PIX8

VES1330 MRC 8260M Two Target RF Sputtering System  $19,500

Includes 2 five inch targets, and one etching station. 6" diameter pallet carrier. Onboard CTI 8 cryo pump, CTI 8200 water cooled compressor, vacuum tube RF supply, ionization and TC gauges, 5 inch targets include: Pb, TiO2, Si, TaSi2, SiO2, Ti, NiB, In2O3, W, Mo, Kovar, SiC and Cr

VES1475 Denton DV-503FP thermal evaporator   $8,500

Includes 18 x 30" Pyrex jar, 2 KVA filament source with tap switch, manual valves with integral cryo baffle  4" NRC diffusion pump, Welch 1397B, 17 cfm mechanical pump, electric hoist and Varian cold cathode & TC gauging. 240/60/1 3 wire 950# 46 x 36 x 72 inches high PIX2 PIX3 PIX4

 
VES2500 Innotec S1000 high speed pumping  module $4,850

Includes Innotec Model R620 diffusion pump rated at 2400 l/s, an Innotec Model LNB62- LN2 trap, ss gate and manifold valves. All electropneumatically operated, system pumping speed rated at 1160 l/s PIX2 PIX3 PIX4

VES2700 Alcatel portable air-cooled diffusion pump vacuum system $4,750

Includes Model PDR250 air-cooled diffusion pump rated at 250 l/s air with ambient -cooled baffle manually operated high vacuum butterfly valve & independent manually operated bellows sealed roughing & foreline valves with an Alcatel Model 2004A - 3.2 CFM - direct drive mechanical roughing pump. Gauging includes Alcatel Model CFA1222 analog combination Penning & single station convection gauge complete with gauge tubes and cables, an additional Alcatel Model CA111, analog single station convection gauge is provided for full time monitoring of the foreline pressure. All components mounted on a convenient roll around cart & terminate in a KF50 flange

VES2800 Edwards Cryo Cooled Diffstak 63 packaged pump system $6,350

Includes Edwards Model CR63M water-cooled diffusion pump w/integral LN2 trap rated at 144 l/s,. manually operated high vacuum butterfly valve, Edwards BRV10 combination manually operated backing/roughing valve, with an Edwards Model E2M5- 4 CFM direct drive mechanical roughing pump. Gauging includes an Edwards 1005 digital combination Penning & two station Pirani gauge. Complete with all gauge tubes and cables. All components are mounted on a convenient roll around cart and terminate in a 2.75" OD Conflat flange.

VES2820 Edwards Cryo-cooled Diffstak 63 packaged pumping system – air-operated $7,150

Includes Edwards CR63P water-cooled diffusioin pump with integral LN2 trap rated at 144 l/s, electropneumatic valves , with an Edwards E2M5 – 4 cfm direct drive mechanical roughing pump. Gauging includes an Edwards 1005 digital combination Penning & two station Pirani gauge. Complete with all gauge tubes and cables. All components are mounted on a convenient roll around cart and terminate in a 2.75" OD Conflat flange

VES2900 Varian HSA-2" air cooled pump stack $3,650

Includes HSA -2" ASA air cooled diffusion pump rated at 150 l/s, Varian 325 cryo trap & electro–pneumatic valves with manifold PIX2  New Surplus but used diffusion pump

VES2920 Varian 3300 series cart mounted diffusion pump assembly POR

HSA/HS2/M2/M4/VHS4/M6/VHS6 systems are available either with or w/o LN2 baffle, gauging, manual or electropneumatic valving. Price dependent upon customer required components.

VES3100 Veeco VS300 Single Lever Controlled Pump System. $4,750

System includes Veeco 3" air cooled diffusion pump rated at 170 l/s, LN2 trap, manually operated valves, Welch 1402 -5.6 CFM- mechanical roughing pump and a combination ion/thermocouple gauge controller All system components are mounted in a convenient roll around enclosure.

VES3600 Gatan 645 Precision Ion Milling System $3,500

For thinning of TEM specimens, complete with imaging system, eucentric goniometer stage & auto termination. The vacuum system includes an air cooled Leybold Model TMP360 turbomolecular pump rated at 345 l/s w/6" OD conflat inlet & NT150/360 controller, an Alcatel 2008A, 7 CFM- direct drive backing pump and an ion & two position thermocouple gauge 

VES3766 Varian VE10 evaporator $1,950

10 x 11" high Pyrex jar, air cooled diffusion pump, two filament posts and mechanical pump. Vacuum tube electronics do not work PIX2 PIX3 PIX4 PIX5

Vacuum Systems as priced are guaranteed to be serviceable. All major system components are guaranteed for 60 days from receipt. This guarantee does not insure system performance to original manufacturer's specification without normal maintenance, such as component cleaning, "O" ring and fluid replacement plus electronic tuning and calibration.


978-744-3546

www.emcgrath.com

7/24/17