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USED RF & SPUTTERING  SUPPLIES

E. McGrath Inc, 35 Osborne St, Salem MA  01970

Note:  We are not affiliated with the companies listed below. Please contact them directly for any inquiries for new equipment.

Advanced Energy

VRF038 Advanced Energy Cesar 1310, 13.56 Mhz, 1,000 watts Type N output, 230/1/50/60  Air cooled Tested to 1000 watts with a 50 ohm load. PIX2 PIX3 PIX4 PIX5 PIX6 $3,750
VRF060 Advanced Energy MDX10K magnetron drive 10 kw DC sputter power supply, 208/60/50/3 No serial port.  PIX2 $4,250
VRF065 Advanced Energy MDX10K slave magnetron drive 208/60/50/3 With serial port. Two in stock, 68# wgt  PIX2 $3,750
VRF070 Advanced Energy MDXII 30K magnetron power supply. 480/60/3 input M/N 3152255-223B s/n 275406 F/R B  PIX2 $8,250
VRF080 Advanced Energy (Commonwealth Scientific) ID3500 ion source drive, Model 2002-004-A.  s/n 5738  220/1 40# net weight $4,850
 

Amplifier Research

 
VRF100 Amplifier Research 700A1, 700 watts, 10 kHz to 1 MHz 37# 115 volts PIX2 $1,450
VRF120 Amplifier Research 150A220, 150 watts, 10 kHz to 220 MHz, 240/1 PIX2 $6,500
VRF130 Amplifier Research 200T2G4, 200 watts, 2-4 GHz 240/1 PIX2 $6,500

Bird

VRF250 Bird 8431, 50 Ohm dummy loads, 500 watts.  NEW     $450

Comdel

VRF300 Comdel CPS 1000 amplifier 40.68 MHz, w.c., solid state, 1 kw, 208/3 $2,750
VRF305 Comdel CPS-500A rf supply, 13.56, 500 watts, air cooled. 208/1 48# PIX2 $1,950
VRF310 Comdel MatchPro CPM-1000 control PIX2 PIX3 $475
VRF320 Comdel CPS-1000 generator, 1 kw, 13.56 water cooled, 208/60/3 82# $2,750
VRF330 Comdel CX-600S generator, 600 watts, 27.12 Mhz, 208/1  air cooled PIX2 PIX3 50# $2,950
VRF340 Comdel CPS 2000 RF supply 13.56 MHz, water cooled solid state, 2 kw Type N connector, 208/3  PIX2 $5,250

ENI division of MKS

VRF400 ENI A-500 linear amplifier, .3 to 35 MHz, 500 watts, 60 dB gain,  Type N connector, 165#. 18 x 24 x 28" high.  230/50/60/1.  PIX2 PIX3 $9,250
VRF401 ENI 3200L-1739 RF Power Amplifier, 250 kHz to 150 MHz, 200 W, 55 dB `115/230 volts $5,750
VRF402 ENI 440LA RF Power Amplifier, 150 kHz to 300 MHz, 40 W, 45 dB 56# PIX2 $2,750
VRF403 ENI 1140LA RF Power Amplifier, 9 kHz to 250 kHz, 1100 W, 55 dB 48# PIX2 $5,250
VRF404 ENI Matchworks MW-5-21021 500 watt matching network, 13.56 Mhz complete with interconnect cable. Removed from working system. PIX2 Newly Arrived $1,950
VRF406 ENI PlasmaLoc 2-HF; PL-2HF-11451 100-450 KHz, 1,400 watts, 50 to 600 ohm impedance, Type C connector 87# s/n 2509 120/50/60/1 PIX2 PIX3 PIX4 More_Info $3,100
VRF410 ENI OEM-6, 650 watts, 13.56 MHZ, 190-250/60/50/1  50 Ohm type N connector. Water Cooled, .8 gpm.  82# several in stock  More_Info $1,950
VRF421 ENI OEM-12 1250 watts, 13.56 MHZ, 208/240/50/601, solid-state, water-cooled, 50 Ohm type N. 15 pin interface connector 2 in stock More_Info $2,950
VRF422 ENI OEM-12L 1250 watts, 13.56 MHZ, 208/240/50/601, solid-state, water-cooled, 50 Ohm type N. 15 pin interface connector 2 in stock PIX2  More_Info $2,950
VRF440 ENI OEM-25 2.5 KW - 13.56 MHZ Solid-state, water-cooled, 208/3 50 Ohm type HN 15 pin interface More_Info $5,250
VRF485 ENI ACG-3 27.12 MHZ, 210 watts, compact, solid-state 115V, 50 ohms, air-cooled More_Info $2,250
VRF486 ENI ACG-3, 13.56 Mhz, 300 watts, air cooled. More_Info $2,450
VRF487 ENI EGB-1400, 9-250 Khz, 1,400 watts. runs, but 3 of 8 fuses blown in RF section.  As-Is $750
VRF490 ENI EGR-4800B, 8-111 KHZ, 4,000 watts , type N 208/60/3 PIX2 More_Info $4,750
     

Other
VRF805 Canon Anelva PDC-307D DC sputter supply, 30 kw, -600 VDC, 50 amps. 200/50/60/3, 125 amps. s/n H90Z015. Schematic H13-16791 286# 23 x 31 x 20" High.  CONV5 lamp lit, needs repair PIX2 PIX3 PIX4 $9,500
VRF807 Daihen microwave triple stub automatic tuner, SMA-20B 2 kw, 2.45 ghz, with CMC-10A remote control and interconnect cable. 24vdc input. New Surplus. 109 x 55mm waveguide. PIX2 PIX3 $1,950
VRF836 Manitou Systems PS-3, 13.56 Mhz, 300 watts with built in auto match. HN output connector.  115 volts. $3,250
VRF851 Tegal CR1144 matching networks, 13.56 mhz PIX2 PIX3 PIX4 2@ $1,750
VRF852 Tegal/Comdel T-1000E generator, 13.56 mhz, w/c 1 KW 2@ $2,450
VRF874 Varian Multi-Range 12 KW DC sputtering power supply. Gen 2.6. Type VPW2870U6, s/n UG105F5, Part # TFS#  460/480/50/60/3. 20 amps.63# PIX2 $4,750

Plasma Therm & RFPP

VRF645 Plasma Therm APC-3 automatic power controller $375
Plasma Therm SEV-1D substrate volt meter $225
Plasma Therm SEV-2D volt meter  $375
VRF716 RFPP AM-20 matching network, 2,000 watts, 13.56 Mhz, water cooled with AMPS-2A controller pdf-info  New Arrival $5,250
 VRF745 HFS250D, 250 watts, 13.56 MHz New Arrival $950

978-744-3546

5/19/22