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USED RF, SPUTTERING & GLOW DISCHARGE POWER SUPPLIES

E. McGrath Inc, 35 Osborne St, Salem MA  01970

Note:  We are not affiliated with the companies listed below. Please contact them directly for any inquiries for new equipment.

Advanced Energy

VRF036 Advanced Energy RFX-600 13.56 Mhz, 600 watts. $2,950
VRF038 Advanced Energy Cesar 1310, 13.56 Mhz, 1,000 watts Type N output, 230/1/50/60  Air cooled $3,750
VRF045 Advanced Energy PDW2200 pulsed generator, 400 khz, 2200 watts, water cooled. Type N connector.  Digital meters, I/O in rear operates generator. 208-230/60/50/3. 41# shipping weight. $4,750
VRF060 Advanced Energy MDX10K magnetron drive 10 kw DC sputter power supply, 208/60/50/3 No serial port.  PIX2 $5,250
VRF065 Advanced Energy MDX10K slave magnetron drive 208/60/50/3 With serial port. Two in stock, 68# wgt  PIX2 $3,750
VRF070 Advanced Energy MDXII 30K magnetron power supply. 480/60/3 input M/N 3152255-223B s/n 275406 F/R B $11,250
VRF080 Advanced Energy (Commonwealth Scientific) ID3500 ion source drive, Model 2002-004-A.  s/n 5738  220/1 40# net weight $4,850

Airco Temescal

VRF120 Airco CL2 glow discharge power supply 5 kV at 400 ma, 240/1 130# net $2,250

Bird

VRF220 Bird 8730 10kw water cooled load  w/ 6080 digital calorimeter,  with flow meter, Cart not included $1,650
VRF240 Bird 8726 5 KW water cooled dummy load 50 ohm New Arrival $625
VRF250 Bird 8431, 50 Ohm dummy loads, 500 watts.  NEW     $450

Comdel

VRF300 Comdel CPS 1000 amplifier 40.68 MHz, w.c., solid state, 1 kw, 208/3 $2,750
VRF320 Comdel CPS-1000 generator, 1 kw, 13.56 water cooled, 208/60/3 $2,750
VRF330 Comdel CX-600S generator, 600 watts, 27.12 Mhz, 208/1  air cooled $2,950
VRF340 Comdel CPS 2000 amplifier 13.56 MHz, w.c. solid state, 2 kw $5,250

ENI division of MKS

VRF400 ENI A-500 linear amplifier, .3 to 35 MHz, 500 watts, 60 dB gain,  Type N connector, 165#. 230/50/60/1.  $9,250
VRF404 ENI Matchwork 5 MW-5N-21021 impedance matching network, 500 watts, 13.56 MHZ, Parts only $500
VRF406 ENI PlasmaLoc 2-HF; 100-450 KHz, 1,400 watts, 50 to 600 ohm impedance, Type C connector 87# 120/50/60/1 PIX2 PIX3 PIX4 More_Info $4,750
VRF410 ENI OEM-6, 650 watts, 13.56 MHZ, 190-250/60/50/1  50 Ohm type N connector. Water Cooled, .8 gpm.  82# More_Info $1,950
VRF420 ENI OEM-12A-21041-51, 1250 watts, 13.56 MHZ, 208/240/50/601, solid-state, water-cooled, 50 Ohm type N. 25 pin interface connector. 125 # net weight More_Info $2,950
VRF421 ENI OEM-12 1250 watts, 13.56 MHZ, 208/240/50/601, solid-state, water-cooled, 50 Ohm type N. 15 pin interface connector More_Info $2,950
VRF422 ENI OEM-12L 1250 watts, 13.56 MHZ, 208/240/50/601, solid-state, water-cooled, 50 Ohm type N. 15 pin interface connector More_Info $2,950
VRF430 ENI OEM-12B-07, 1250 watts, 13.56 MHZ, 208/240/50/60/1, solid-state, water-cooled, 50 Ohm type N 15 pin interface connector and RS-232.  98 # net weight. More_Info $4,500
VRF435 ENI OEM-12B3, 1250 watts, 13.56 MHZ, 208/240/50/60/3, solid-state, water-cooled, 50 Ohm type N 15 pin interface connector and RS-232. 92 # net weight More_Info $4,750
VRF440 ENI OEM-25 2.5 KW - 13.56 MHZ Solid-state, water-cooled, 208/3 50 Ohm type HN 15 pin interface More_Info $5,250
VRF450 ENI OEM-50-2 (XL), 3 KW - 13.56 MHZ solid-state, water-cooled, 4 gallons per minute 190-240/60/50/3, 50 Ohm, type N output. 375#  net 25 pin interface PIX2 More_Info $5,950
VRF485 ENI ACG-3 27.12 MHZ, 210 watts, compact, solid-state 115V, 50 ohms, air-cooled More_Info $2,250
VRF486 ENI ACG-3, 13.56 Mhz, 300 watts, air cooled. More_Info $2,450
VRF487 ENI EGB-1400, 9-250 Khz, 1,400 watts. runs, but 3 of 8 fuses blown in RF section.  As-Is $750
VRF490 ENI EGR-4800B, 8-111 KHZ, 4,000 watts , type N 208/60/3 More_Info $4,750
VRF495 ENI DCG-100A DC plasma generator, DCG2D series, dual 5 KW outputs 208/3/50/60. Master control with full front panel. 2 in stock. PIX2 DCG2D-A001100020M1. Mfg 2000. 50# net weight $3,750
     
     

Other
VRF800 Applied Materials matching network 13.56 MHz 0010-04916, est. 500 watts PIX2   PIX3   PIX4   PIX5 $1,250
VRF805 Anelva PDC-307D DC sputter supply, 30 kw, -600 VDC, 50 amps. 200/50/60/3, 125 amps. s/n H90Z015. Schematic H13-16791 286# 23 x 31 x 20" High.  CONV5 lamp lit, needs repair PIX2 $9,500
VRF807 Daihen microwave triple stub automatic tuner, SMA-20B 2 kw, 2.45 ghz, with CMC-10A remote control and interconnect cable. 24vdc input. New Surplus. 109 x 55mm waveguide. PIX2 PIX3 $1,950
VRF822 Henry Radio 2 kw RF generator, 13.56 Mhz. 208/60/3 input $1,950
VRF836 Manitou Systems PS-3, 13.56 Mhz, 300 watts with built in auto match. HN output connector.  115 volts. $3,250
VRF851 Tegal CR1144 matching networks, 13.56 mhz PIX2 PIX3 PIX4 2@ $1,750
VRF852 Tegal/Comdel T-1000E generator, 13.56 mhz, w/c 1 KW 2@ $2,450
VRF870 Varian 980-2084 7 KW DC S gun  control only, no supply as pictured $495
VRF872 Varian source control assembly model 697090-01 $550
VRF874 Varian Multi-Range 12 KW DC sputtering power supply. Gen 2.6. Type VPW2870U6, s/n UG105F5, Part # TFS#  460/480/50/60/3. 20 amps.63# PIX2 $4,750

Plasma Therm & RFPP

VRF620 Plasma Therm HESP heat exchanger $625
VRF640 Plasma Therm HFS500E 13.56 MHz, 500 watts , tube a.c. $1,750
VRF650 Plasma Therm CEX-2, Common emmiter driver with phase shifter option, allows two generators to work in parallel $1,250
VRF645 Plasma Therm CEX-2;standard version $375
Plasma Therm APC-3 automatic power controller $375
Plasma Therm SEV-1D substrate volt meter $225
Plasma Therm SEV-2D volt meter  $375
VRF716 RFPP AM-20 matching network, 2,000 watts, 13.56 Mhz, water cooled with AMPS-2A controller pdf-info  New Arrival $5,250
 VRF745 HFS250D, 250 watts, 13.56 MHz New Arrival $950

978-744-3546

8/4/17