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USED ULTRA-HIGH VACUUM SYSTEMS
E. McGrath Inc, 35 Osborne St, Salem MA 01970
UHV100 VARIAN VT-114 14" UHV system
includes: AS-NEW $15,000
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14" ID ss vacuum cylinder w/nine 2 ¾" Conflat ports, poppet isolation valve &
12" tall ss bell jar
w/14". Wheeler flange. Pumping equipment includes 6 triode ion pumps with a
total pumping speed of 240 l/s, multi-filament titanium sublimation source, cryo
panel & dual Vacsorb roughing system w/manifold. Electronics include Varian
921-0066 ion pump power supply, Varian 922-0043 TSP power supply, Varian 845
digital ionization gauge controller & bake-out power supply w/timer, without
bakeout shroud. s/n M005-490 Chamber weight 325#.
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UHV120 VARIAN FC12 - 12" UHV system includes: $6,950
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12" dia ss vacuum cylinder w/5 integral triode ion pumps w/a total pumping speed of 200 l/s. The 12" dia x 12" tall ss bell jar has two 6" OD conflat & three 2-3/4" OD conflat ports. This system also includes a manually operated poppet style isolation valve, Varian 921-0066 ion pump power supply, Varian TSP w/cryo-array w/controls & two stage vac sorb roughing manifold.
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UHV125 VARIAN 12" UHV system includes:
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12" dia ss vacuum cylinder w/5 integral ion pumps w/a total
pumping speed of 200 l/s. PIX2 |
UHV140 CUSTOM VEECO UHV system includes:.$4,250
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includes 10" dia ss chamber, which is 15" deep.
The chamber cover is O-ring sealed & has a 1 ½" viewport. The chamber has two sets
of Curvac ports around the circumference. The upper set of ports include four 2 ¾" and
three 3-3/8" Curvac flanges. The lower set of ports include three 2 ¾" and one 4 ½"
Curvac flanges. The pumping system consists of two Ultek sorption roughing pumps
including manifold & manual valving, a Veeco MI300 Mag Ion pump rated at 300 l/s
complete w/ Model CU510 power supply . The system is mounted on a compact table
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UHV180 PERKIN
ELMER MODEL CFR $3,950
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roughing system includes: a dry mechanical pump & three toggle valve actuated
rectangular sorption pumps w/ LN2 Dewar which attain a contaminant free roughing
pressure below 1 x 10-4 torr w/pumping speed comparable to a 50 CFM mechanical
roughing pump. Sorption pumps have built in bakeout heaters w/timer |
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UHV190 Perkin-Elmer
283-8550 XYZ manipulator $1,795
X & Y axis, +/- .5" travel, 1" Z axis. 2-3/4" CF |
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UHV091 MDC
PSM1502 XYZ manipulator $1,995
X & Y axis, +/- .5" travel, 2" Z axis. 2-3/4" CF |
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UHV200 VARIAN MEGASORB MODEL 931-5010 Roughing Module: $3,250
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Includes
two stage sorption pump, manifold, manually operated valves, bakeout & molecular sieve (Manual) .
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UHV220 VARIAN MEGASORB II MODEL 931-5009 Roughing Module includes: $4,500
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two stage sorption pump, venturi, manifold, gauging, bakeout control, pneumatic valves & molecular sieve
(automatic).
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SORPTION PUMPS, HEATERS, MANIFOLDS, CONFLAT VALVES, CONFLAT FEEDTHRUS &
HARDWARE OF ALL TYPES INCLUDING KF, LF and DEPENDEX are normally available
CALL FOR PRICING AND DELIVERY
978-744-3546 4/14/09 |
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