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USED RF & SPUTTERING  SUPPLIES

E. McGrath Inc, 35 Osborne St, Salem MA  01970

Note:  We are not affiliated with the companies listed below. Please contact them directly for any inquiries for new equipment.

Advanced Energy

VRF060 Advanced Energy MDX10K magnetron drive 10 kw DC sputter power supply, 208/60/50/3 No serial port.  PIX2 $4,250
VRF065 Advanced Energy MDX10K slave magnetron drive 208/60/50/3 With serial port. Two in stock, 68# wgt  PIX2 $3,750
VRF070 Advanced Energy MDXII 30K magnetron power supply. 480/60/3 input M/N 3152255-223B s/n 275406 F/R B  PIX2 $8,250
VRF080 Advanced Energy (Commonwealth Scientific) ID3500 ion source drive, Model 2002-004-A.  s/n 5738  220/1 40# net weight $4,850

Bird

Comdel

VRF330 Comdel CX-600S generator, 600 watts, 27.12 Mhz, 208/1  air cooled. Powers up but stays on remote input, even with jumper installed on rear PIX2 PIX3 PIX4 PIX5 50# $2,450

ENI division of MKS

VRF400 ENI A-500 linear amplifier, .3 to 35 MHz, 500 watts, 60 dB gain,  Type N connector, 165#. 18 x 24 x 28" high.  230/50/60/1.  PIX2 PIX3 $9,250
VRF406 ENI PlasmaLoc 2-HF; PL-2HF-11451 100-450 KHz, 1,400 watts, 50 to 600 ohm impedance, Type C connector 87# s/n 2509 120/50/60/1 PIX2 PIX3 PIX4 More_Info $3,100

VRF485

ENI ACG-3 27.12 MHZ, 210 watts, compact, solid-state 115V, 50 ohms, air-cooled More_Info

$2,250

VRF486

ENI ACG-3, 13.56 Mhz, 300 watts, air cooled. More_Info

$2,450

VRF490

ENI EGR-4800B, 8-111 KHZ, 4,000 watts , type N 208/60/3 PIX2 More_Info

$4,750

 

 

 


Other

VRF836

Manitou Systems PS-3, 13.56 Mhz, 300 watts with built in auto match. HN output connector.  115 volts.

$3,250

Plasma Therm & RFPP

VRF716

RFPP AM-20 matching network, 2,000 watts, 13.56 Mhz, water cooled with AMPS-2A controller pdf-info  New Arrival

$5,250

978-744-3546

7/17/26