Balzers Model SCS800 Source Isolated Fast Cycle E Beam Box Coater

SKU: VES0200

Price: $24,500

WAREHOUSE REDUCTION SPECIAL 

Balzers SCS-800 includes 35 ½”” w x 35″d x 26″ high water traced ss deposition chamber w/horizontal substrate rotary & full opening, hinged, “O” ring sealed door w/film shutter viewport. The source chamber is isolated from the deposition chamber by a large plate valve in order to facilitate short pump down times. The pumping system consists of a Balzers Model RCP501Z cryopump rated at 27500 l/s water vapor or 10,000 l/s air, complete w/Balzers Model UCC064 water cooled compressor, all hoses, cables, temperature indicator, electropneumatic valves/microprocessor controlled sequencer & Balzers  DUO100-57 CFM- mechanical pump.

The evaporative system includes a Balzers Model ESQ113, multi-pocket E Beam Gun w/one 60 cc crucible & two 30 cc crucibles w/turret source selector, wire feed, shutter, Balzers EHV110A -15 KW- E Beam power supply w/one EKS110A gun control & one LCS110A longitudinal sweep control, substrate heaters controller, RF power supply &matching network for RF etch, and  Ionization & pirani gauges.