K H Frederick 1854 32″ Box thermal evaporator

SKU: VES0700

Price: $67,500

Includes 32″ dia z 30″ tall cylindrical back stainless steel chamber with full opening, hinged, o-ring sealed door with 6″ ID viewport.  The pumping system consists of a Varian VHS10 high speed diffusion pump rated at 5300 l/s, a Varian 330 water cooled baffle, pneumatic vane style  throttle valve, electropneumatic valves with sequencer and an Edwards E2M80; 57 cfm, two stage direct drive mechanical roughing pump.

The evaporative system includes dual 5 KVA filament transformers with SCR controller & ammeter, two pairs of high current feedthroughs with shutter, 30″ diameter domed substrate holder with motorized horizontal plane rotation & speed control, glow discharge power supply; 7KV @ 700ma, 4 kw quartz lamp substrate heaters with control & timer, Sloan Omni III quartz crystal deposition controller. A cold cathode discharge & two position thermocouple gauge are also included.