VARIAN VT-114 14″ UHV

SKU: UHV100

Price: $15,000

system includes: 14″ ID ss vacuum cylinder w/nine 2 ¾” Conflat ports, poppet isolation valve & 12″ tall ss bell jar
w/14″. Wheeler flange. Pumping equipment includes 6 triode ion pumps with a total pumping speed of 240 l/s, multi-filament titanium sublimation source, cryo panel & dual Vacsorb roughing system w/manifold. Electronics include Varian 921-0066 ion pump power supply, Varian 922-0043 TSP power supply, Varian 845 digital ionization gauge controller & bake-out power supply w/timer, without bakeout shroud. s/n M005-490 Chamber weight 325#